| contants | specifiction | model number |
| 200W mercury XENON LAMP |
MARK-5Z/7/8 | 201HS-D2 |
|
250W Ultra High Pressure Mercury LAMP |
EXE3000 | 200MX |
| 250W
Ultra High Pressure Mercury LAMP |
ACT12 | T250 |
| 250W
Ultra High Pressure Mercury LAMP |
LITHIUS | LP2511T |
| 200W Mercury XENON LAMP | SK-2000/3000 RF CUBE |
L8831(I line) |
| 200W Mercury XENON LAMP | SK-2000/3000 UL750/EX250 |
201HS-2 |
| 250W
Ultra High Pressure Mercury LAMP |
UL750 | 750DL |
| 250W Mercury XENON LAMP | TOSCURE751 | SH1002MA |
| 75W XENON LAMP | SP-3 (Ellipsometer Function Mounting Device) SP-5 (Ellipsometer Function Mounting Device) ANUP5203 |
UXM-Q256BY |
| 75W XENON LAMP | UV1050 | ANUPS204 |
| 150W XENON LAMP | ANUP5252 KLA5100 LC5 serise(L8388) LC6 serise(L8878) LC5 serise(L8388) |
ANUPS252 |
| Deuterium Lamp | LC5 serise(L8222,L8333) | 29-018048 29-014965 29-013586 |
| Deuterium Lamp | LC6 serise(L8858,L8868) | L6923-01 L6311-50 |
| Deuterium Lamp | LC5 serise(L8222,L8333) | L8281 |
| SCT Mode Lamp | UV clean Device/UV ink dry out |