| 內容 | 規格 | 純正型番 |
| Plasma Process Magnetron Overhaul Process: Bump/RDL Plating Equipment: DESCUM Equipment Model : ULVAC NA-1300 head 型号:MG-30CT-W |
3KW 水冷 |
Magnetron Model: H0902 |
| UV Curing twin chamber AMAT P/N 0195-11127 AMAT P/N 0195-04791 |
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| MKS Astex FI20162-1 MKS Astex FI20162-3 Lam2300 metal stripper (P/N 687-013518-002) PSK (P/N 5010-3900170) |
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| AMAT DPS metal stripper MKS ASTeX SXRHC P/N 0190-09769 P/N 0190-09265 P/N 0190-09769 |